4. Data processing: generic control systems or specific application
  5. Specific application, apparatus or process
  6. Article handling

Chih-Kun Chen

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Chemical mechanical polishing apparatus having a measuring...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Device used for detecting clamping force of processed object...

Measuring and testing – Specimen stress or strain – or testing by stress or strain... – Specimen clamp – holder – or support
Reexamination Certificate

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Guide ring removal device

Abrading – Work holder – Work rotating
Reexamination Certificate

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Humidity sensor and fabrication method thereof

Measuring and testing – Gas analysis – Moisture content or vapor pressure
Reexamination Certificate

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In-line oscillating device

Abrading – Abrading process – Abradant supplying
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2675954

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