4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Liquid phase etching

Chienliu Chang

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Dry etching method for oxide semiconductor film

Etching a substrate: processes – Gas phase etching of substrate
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Etching method, pattern forming process, thin-film...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Method of fabricating structure

Plastic and nonmetallic article shaping or treating: processes – Mechanical shaping or molding to form or reform shaped article – Shaping against forming surface
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Micro-structure fabrication method

Metal working – Method of mechanical manufacture – Assembling or joining
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Semiconductor device

Active solid-state devices (e.g. – transistors – solid-state diode – Semiconductor is an oxide of a metal or copper sulfide
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Profile ID: LFUS-PAI-P-2291293

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