4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Chien Chao Huang

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Method for manufacturing metal oxide semiconductor...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
Reexamination Certificate

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Method for manufacturing phase-shifting mask

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method of aligning a mask in photolithographic process

Radiation imagery chemistry: process – composition – or product th – Registration or layout process other than color proofing
Patent

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Profile ID: LFUS-PAI-P-1044386

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