4. Semiconductor device manufacturing: process
  5. With measuring or testing
  6. Electrical characteristic sensed

Chia-Der Chang

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Efficient method for monitoring gate oxide damage related to pla

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
Patent

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Method for forming an improved low power SRAM contact

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Planarization method for deep sub micron shallow trench...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1587790

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