4. Coating processes
  5. Direct application of electrical, magnetic, wave, or...
  6. Plasma

Cheng-Che Lee

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Capacitor dielectric structure of a DRAM cell and method for...

Semiconductor device manufacturing: process – Making passive device
Reexamination Certificate

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Capacitor dielectric structure of a DRAM cell and method for...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Method for preventing native oxide growth during nitridation

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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Method for reducing capacitance in metal lines using air gaps

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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Method of forming a capacitor dielectric structure

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2018743

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