4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Responsive to non-electrical signal

Changqing Zhan

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MEMS pixel sensor

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
Reexamination Certificate

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Piezo-diode cantilever MEMS fabrication method

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Piezo-TFT cantilever MEMS

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3122478

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