MEMS pixel sensor

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal

Reexamination Certificate

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Details

C257S415000, C257S417000, C257S418000, C257S419000, C257SE27006, C349S199000

Reexamination Certificate

active

07425749

ABSTRACT:
A MEMS pixel sensor is provided with a thin-film mechanical device having a mechanical body, with a mechanical state responsive to a proximate environment. A thin-film electronic device converts the mechanical state into electrical signals. A pixel interface supplies power to the electronic device and transceives electrical signals. The sensor is able to operate dynamically, in real-time. For example, if the mechanical device undergoes a sequence of mechanical states at a corresponding plurality of times, the electronic device is able to supply a sequence of electrical signals to the pixel interface that are responsive to the sequence of mechanical states, at the plurality of times. Each MEMS pixel sensor may include a number of mechanical devices, and corresponding electronic devices, to provide redundancy or to measure a broadband response range.

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Joao Gaspar, Haohua Li, Paulo Peieiro Freitas, “Integrated Magnetic Sensing of Electro-statically Actuated Thin-Film Microbridges”, Journal of MicroElectroMechanical Systems, vol. 12, No. 5, Oct. 2003, p. 550-556.

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