4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Chang-woong Chu

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Conducting line of semiconductor device and manufacturing...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method of manufacturing a contact of a semiconductor device...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Methods for forming conductive contact body for integrated...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Wafer stage including electrostatic chuck and method for...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Wafer stage including electrostatic chuck and method for...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
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Profile ID: LFUS-PAI-P-2548950

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