4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Cha-won Koh

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Method for forming hard mask patterns having a fine pitch...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for forming micro-pattern of semiconductor device

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method for forming patterns of semiconductor device

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Method of forming a hard mask and method of forming a fine...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method of forming a hard mask and method of forming a fine...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2259272

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