4. Etching a substrate: processes
  5. Forming or treating article containing a liquid crystal...

Byung C. Ahn

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Apparatus for making a semiconductor

Coating apparatus – Gas or vapor deposition – With treating means
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Method for making a semiconductor using corona discharge

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Signal line structure for a TFT-LCD and method for fabricating t

Etching a substrate: processes – Forming or treating article containing a liquid crystal...
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