4. Etching a substrate: processes
  5. Nongaseous phase etching of substrate
  6. Etching inorganic substrate

Byoung-moon Yoon

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Adjustable selectivity etching solutions and methods of etching

Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
Patent

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Apparatus and method for cleaning a semiconductor wafer

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Megasonic cleaning apparatus for fabricating semiconductor...

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Reexamination Certificate

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Method of manufacturing a semiconductor device

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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Methods and compositions for removal of anti-reflective...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-201254

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