4. Thermal measuring and testing
  5. Thermal calibration system

Bruce W. Peuse

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Heater temperature uniformity qualification tool

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Method and apparatus for measuring substrate temperatures

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
Reexamination Certificate

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Method and apparatus for measuring substrate temperatures

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
Patent

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Method and apparatus for measuring substrate temperatures

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
Patent

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Method of calibrating a temperature measurement system

Thermal measuring and testing – Thermal calibration system
Patent

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Profile ID: LFUS-PAI-P-1473683

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