Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
Patent
1994-12-19
1997-08-26
Cuchlinski, Jr., William A.
Thermal measuring and testing
Temperature measurement
In spaced noncontact relationship to specimen
374126, G01J 506
Patent
active
056604726
ABSTRACT:
A method of correcting a temperature probe reading in a thermal processing chamber for heating a substrate, including the steps of heating the substrate to a process temperature; using a first probe and a second probe to measure the temperature of the substrate, the first probe having a first effective reflectivity and the second chamber having a second effective reflectivity, the first probe producing a first temperature indication and the second probe producing a second temperature indication, and wherein the first and second effective reflectivities are different; and from the first and second temperature indications, deriving a corrected temperature reading for the first probe, wherein the corrected temperature reading is a more accurate indicator of an actual temperature of the substrate than are uncorrected readings produced by both the first and second probes.
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Miner Gary E.
Peuse Bruce W.
Yam Mark
Applied Materials Inc.
Cuchlinski Jr. William A.
Hirshfeld Andrew
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