4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Brigitte C. Stoehr

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Method and apparatus for etching photomasks

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method and apparatus for etching photomasks

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method and apparatus for etching photomasks

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Methods and apparatus for etching metal layers on substrates

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Multi-step process for etching photomasks

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2443439

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