4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Forming from vapor or gaseous state
  6. With decomposition of a precursor

Bomy A. Chen

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Apparatus and method for shielding a wafer from charged...

Etching a substrate: processes – Etching and coating occur in the same processing chamber
Reexamination Certificate

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Damascene process for forming ferroelectric capacitors

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Double polysilicon process for providing single chip high...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Embedded one-time programmable non-volatile memory using...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Method for forming junction on insulator (JOI) structure

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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