4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Betty Tang

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Counterbore dielectric plasma etch process particularly...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Integrated low k dielectrics and etch stops

Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating
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Integrated low k dielectrics and etch stops

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
Reexamination Certificate

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Integrated low K dielectrics and etch stops

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
Reexamination Certificate

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Integrated low K dielectrics and etch stops

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2055647

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