4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Aviza Europe Limited

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Damascene structure with integral etch stop layer

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
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Magnetron sputtering

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Magnetron sputtering

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for forming a film on a substrate

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Methods and apparatus for forming precursors

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of coating supply or source outside of primary...
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