4. Optical: systems and elements
  5. Mirror
  6. With support

Avijit K. Ray-Chaudhuri

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Fourier filters and wafer inspection systems

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Fourier filters and wafer inspection systems

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Low thermal distortion extreme-UV lithography reticle

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Low thermal distortion extreme-UV lithography reticle

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Low thermal distortion Extreme-UV lithography reticle and...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2047690

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