4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Atsushi Kobaru

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Apparatus using charged particle beam

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Charged particle beam apparatus

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Charged particle beam apparatus

Data processing: measuring – calibrating – or testing – Measurement system – Measured signal processing
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Image forming method and charged particle beam apparatus

Computer graphics processing and selective visual display system – Data responsive crt display control
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Image forming method and charged particle beam apparatus

Computer graphics processing and selective visual display system – Data responsive crt display control
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Profile ID: LFUS-PAI-P-1897407

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