Image forming method and charged particle beam apparatus

Details Image forming method and charged particle beam apparatus Image forming method and charged particle beam apparatus

2007-03-06

2007-03-06

Tran, Henry N. (Department: 2629)

Computer graphics processing and selective visual display system

Data responsive crt display control

C250S3960ML, C315S001000, C315S364000, C315S370000, C348S284000, C348S325000, C348S806000

Reexamination Certificate

active

11298590

ABSTRACT:
An image forming method and a charged particle beam apparatus suitable for suppressing the inclination of charging when scanning a two-dimensional area with a charged particle beam. A third scanning line located between a first scanning line and a second scanning line is scanned. After the first, second and third scanning lines have been scanned, a plurality of scanning lines are scanned between the first and third scanning lines and between the second and third scanning lines.

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