Charged particle beam apparatus

Details Charged particle beam apparatus Charged particle beam apparatus

2011-08-16

2011-08-16

Barbee, Manuel L (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system

Measured signal processing

C250S310000

Reexamination Certificate

active

08000939

ABSTRACT:
An object of the present invention is to provide a synthesized signal forming method and an apparatus thereof for realizing both noise reduction and dosage reduction when synthesizing signals detected based on scans performed on a charged particle beam. In order to achieve the above object, with a method that synthesizes signals detected based on a plurality of scans performed on a charged particle beam to form a synthesized signal, a multiplication is performed among a plurality of signals obtained by the plurality of scans and, at the same time, for a multiplied signal, a calculation is performed in which an inverse of the number of previous scans is used as an exponent.

REFERENCES:
patent: 5929439 (1999-07-01), Todokoro et al.
patent: 7283659 (2007-10-01), Bakker et al.
patent: 9-330679 (1997-12-01), None
patent: 2000-182556 (2000-06-01), None

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