4. Photocopying
  5. Projection printing and copying cameras
  6. Step and repeat

ASML Netherlands BV

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Angularly resolved scatterometer, inspection method,...

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Reexamination Certificate

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Lithographic apparatus and device manufacturing method

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
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Lithographic apparatus and device manufacturing method

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Lithographic apparatus and device manufacturing method

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Methods and systems for lithographic gray scaling

Photocopying – Projection printing and copying cameras – Focus or magnification control
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