Methods and systems for lithographic gray scaling

Details Methods and systems for lithographic gray scaling Methods and systems for lithographic gray scaling

2007-08-07

2007-08-07

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Focus or magnification control

C355S067000

Reexamination Certificate

active

11024030

ABSTRACT:
Improved gray scaling imaging methods and systems include a group of elements within an array of individually controllable elements that project a part of a radiation beam onto a lens in an array of microlenses, and are individually controllable so that any number of the individually controllable elements may be switched on or off to generate a gray scale.

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