Angularly resolved scatterometer, inspection method,...

Details Angularly resolved scatterometer, inspection method,... Angularly resolved scatterometer, inspection method,...

2007-03-30

2009-08-04

Nguyen, Sang (Department: 2886)

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

C356S301000, C250S339020, C250S458100, C359S308000

Reexamination Certificate

active

07570358

ABSTRACT:
An angularly resolved scatterometer uses a broadband radiation source and an acousto-optical tunable filter to select one or more narrowband components from the broadband beam emitted by the source for use in measurements. A feedback loop can be used to control the intensity of the selected narrowband components to reduce noise.

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