4. Data processing: structural design, modeling, simulation, and em
  5. Modeling by mathematical expression

Arulkumar P. Shanmugasundram

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Feedback control of a chemical mechanical polishing device...

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Feedback control of chemical mechanical polishing device...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – For liquid etchant
Reexamination Certificate

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Feedback control of plasma-enhanced chemical vapor...

Semiconductor device manufacturing: process – With measuring or testing – Optical characteristic sensed
Reexamination Certificate

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Integrating tool, module, and fab level control

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Method of feedback control of sub-atmospheric chemical vapor...

Coating processes – Measuring – testing – or indicating
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Profile ID: LFUS-PAI-P-2226773

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