Feedback control of chemical mechanical polishing device...

Details Feedback control of chemical mechanical polishing device... Feedback control of chemical mechanical polishing device...

2006-12-27

2011-12-06

MacArthur, Sylvia R. (Department: 1716)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

For liquid etchant

C156S345150, C156S345220

Reexamination Certificate

active

08070909

ABSTRACT:
A method of controlling surface non-uniformity of a wafer in a polishing operation includes (a) providing a model for a wafer polishing that defines a plurality of regions on a wafer and identifies a wafer material removal rate in a polishing step of a polishing process for each of the regions, wherein the polishing process comprises a plurality of polishing steps, (b) polishing a wafer using a first polishing recipe based upon an incoming wafer thickness profile, (c) determining a wafer thickness profile for the post-polished wafer of step (b), and (d) calculating an updated polishing recipe based upon the wafer thickness profile of step (c) and the model of step (a) to maintain a target wafer thickness profile. The model can information about the tool state to improve the model quality. The method can be used to provide feedback to a plurality of platen stations.

REFERENCES:
patent: 3205485 (1965-09-01), Noltingk
patent: 3229198 (1966-01-01), Libby
patent: 3767900 (1973-10-01), Chao et al.
patent: 3920965 (1975-11-01), Sohrwardy
patent: 4000458 (1976-12-01), Miller et al.
patent: 4207520 (1980-06-01), Flora et al.
patent: 4209744 (1980-06-01), Gerasimov et al.
patent: 4302721 (1981-11-01), Urbanek et al.
patent: 4368510 (1983-01-01), Anderson
patent: 4609870 (1986-09-01), Lale et al.
patent: 4616308 (1986-10-01), Morshedi et al.
patent: 4663703 (1987-05-01), Axelby et al.
patent: 4698766 (1987-10-01), Entwistle et al.
patent: 4717596 (1988-01-01), Barbee et al.
patent: 4750141 (1988-06-01), Judell et al.
patent: 4755753 (1988-07-01), Chern
patent: 4757259 (1988-07-01), Charpentier
patent: 4796194 (1989-01-01), Atherton
patent: 4901218 (1990-02-01), Cornwell
patent: 4938600 (1990-07-01), Into
patent: 4957605 (1990-09-01), Hurwitt et al.
patent: 4967381 (1990-10-01), Lane et al.
patent: 4974543 (1990-12-01), Jansen
patent: 5089970 (1992-02-01), Lee et al.
patent: 5108570 (1992-04-01), Wang
patent: 5208765 (1993-05-01), Turnbull
patent: 5220517 (1993-06-01), Sierk et al.
patent: 5226118 (1993-07-01), Baker et al.
patent: 5231585 (1993-07-01), Kobayashi et al.
patent: 5236868 (1993-08-01), Nulman
patent: 5240552 (1993-08-01), Yu et al.
patent: 5260868 (1993-11-01), Gupta et al.
patent: 5270222 (1993-12-01), Moslehi
patent: 5283141 (1994-02-01), Yoon et al.
patent: 5295242 (1994-03-01), Mashruwala et al.
patent: 5309221 (1994-05-01), Fischer et al.
patent: 5329463 (1994-07-01), Sierk et al.
patent: 5338630 (1994-08-01), Yoon et al.
patent: 5347446 (1994-09-01), Iino et al.
patent: 5367624 (1994-11-01), Cooper
patent: 5369544 (1994-11-01), Mastrangelo
patent: 5375064 (1994-12-01), Bollinger
patent: 5398336 (1995-03-01), Tantry et al.
patent: 5402367 (1995-03-01), Sullivan et al.
patent: 5408405 (1995-04-01), Mozumder et al.
patent: 5410473 (1995-04-01), Kaneko et al.
patent: 5420796 (1995-05-01), Weling et al.
patent: 5427878 (1995-06-01), Corliss
patent: 5444837 (1995-08-01), Bomans et al.
patent: 5469361 (1995-11-01), Moyne
patent: 5485082 (1996-01-01), Wisspeintner et al.
patent: 5490097 (1996-02-01), Swenson et al.
patent: 5495417 (1996-02-01), Fuduka et al.
patent: 5497316 (1996-03-01), Sierk et al.
patent: 5497381 (1996-03-01), O'Donoghue et al.
patent: 5503707 (1996-04-01), Maung et al.
patent: 5508947 (1996-04-01), Sierk et al.
patent: 5511005 (1996-04-01), Abbe et al.
patent: 5519605 (1996-05-01), Cawlfield
patent: 5525808 (1996-06-01), Irie et al.
patent: 5526293 (1996-06-01), Mozumder et al.
patent: 5534289 (1996-07-01), Bilder et al.
patent: 5535128 (1996-07-01), Laube et al.
patent: 5541510 (1996-07-01), Danielson
patent: 5546179 (1996-08-01), Cheng
patent: 5546312 (1996-08-01), Mozumder et al.
patent: 5553195 (1996-09-01), Meijer
patent: 5586039 (1996-12-01), Hirsch et al.
patent: 5599423 (1997-02-01), Parker et al.
patent: 5602492 (1997-02-01), Cresswell et al.
patent: 5603707 (1997-02-01), Trombetta et al.
patent: 5617023 (1997-04-01), Skalski
patent: 5621241 (1997-04-01), Jain
patent: 5627083 (1997-05-01), Tounai
patent: 5629216 (1997-05-01), Wijaranakula et al.
patent: 5642296 (1997-06-01), Saxena
patent: 5646870 (1997-07-01), Krivokapic et al.
patent: 5649169 (1997-07-01), Berezin et al.
patent: 5654903 (1997-08-01), Reitman et al.
patent: 5655951 (1997-08-01), Meikle et al.
patent: 5657254 (1997-08-01), Sierk et al.
patent: 5660895 (1997-08-01), Lee et al.
patent: 5661669 (1997-08-01), Mozumder et al.
patent: 5663797 (1997-09-01), Sandhu
patent: 5664987 (1997-09-01), Renteln
patent: 5664990 (1997-09-01), Adams et al.
patent: 5665199 (1997-09-01), Sahota et al.
patent: 5665214 (1997-09-01), Iturralde
patent: 5666297 (1997-09-01), Britt et al.
patent: 5667424 (1997-09-01), Pan
patent: 5674787 (1997-10-01), Zhao et al.
patent: 5694325 (1997-12-01), Fukuda et al.
patent: 5695810 (1997-12-01), Dubin et al.
patent: 5698989 (1997-12-01), Nulman
patent: 5711843 (1998-01-01), Jahns
patent: 5719495 (1998-02-01), Moslehi
patent: 5719796 (1998-02-01), Chen
patent: 5733171 (1998-03-01), Allen et al.
patent: 5735055 (1998-04-01), Hochbein et al.
patent: 5740429 (1998-04-01), Wang et al.
patent: 5751582 (1998-05-01), Saxena et al.
patent: 5754297 (1998-05-01), Nulman
patent: 5761064 (1998-06-01), La et al.
patent: 5761065 (1998-06-01), Kittler et al.
patent: 5764543 (1998-06-01), Kennedy
patent: 5777901 (1998-07-01), Berezin et al.
patent: 5787021 (1998-07-01), Samaha
patent: 5787269 (1998-07-01), Hyodo
patent: 5808303 (1998-09-01), Schlagheck et al.
patent: 5812407 (1998-09-01), Sato et al.
patent: 5823854 (1998-10-01), Chen
patent: 5824599 (1998-10-01), Schacham-Diamand et al.
patent: 5825356 (1998-10-01), Habib et al.
patent: 5825913 (1998-10-01), Rostami et al.
patent: 5828778 (1998-10-01), Hagi et al.
patent: 5831851 (1998-11-01), Eastburn et al.
patent: 5832224 (1998-11-01), Fehskens et al.
patent: 5838595 (1998-11-01), Sullivan et al.
patent: 5838951 (1998-11-01), Song
patent: 5844554 (1998-12-01), Geller et al.
patent: 5857258 (1999-01-01), Penzes et al.
patent: 5859777 (1999-01-01), Yokoyama et al.
patent: 5859964 (1999-01-01), Wang et al.
patent: 5859975 (1999-01-01), Brewer et al.
patent: 5862054 (1999-01-01), Li
patent: 5863807 (1999-01-01), Jang et al.
patent: 5867389 (1999-02-01), Hamada et al.
patent: 5870306 (1999-02-01), Harada
patent: 5871805 (1999-02-01), Lemelson
patent: 5874345 (1999-02-01), Coronel et al.
patent: 5883437 (1999-03-01), Maruyama et al.
patent: 5888120 (1999-03-01), Doran
patent: 5889991 (1999-03-01), Consolatti et al.
patent: 5901313 (1999-05-01), Wolf et al.
patent: 5903455 (1999-05-01), Sharpe, Jr. et al.
patent: 5910011 (1999-06-01), Cruse
patent: 5910846 (1999-06-01), Sandhu
patent: 5912678 (1999-06-01), Saxena et al.
patent: 5916016 (1999-06-01), Bothra
patent: 5923553 (1999-07-01), Yi
patent: 5926690 (1999-07-01), Toprac et al.
patent: 5930138 (1999-07-01), Lin et al.
patent: 5937323 (1999-08-01), Orczyk et al.
patent: 5940300 (1999-08-01), Ozaki
patent: 5943237 (1999-08-01), Van Boxem
patent: 5943550 (1999-08-01), Fulford, Jr. et al.
patent: 5960185 (1999-09-01), Nguyen
patent: 5960214 (1999-09-01), Sharpe, Jr. et al.
patent: 5961369 (1999-10-01), Bartels et al.
patent: 5963881 (1999-10-01), Kahn et al.
patent: 5975994 (1999-11-01), Sandhu et al.
patent: 5978751 (1999-11-01), Pence et al.
patent: 5982920 (1999-11-01), Tobin, Jr. et al.
patent: 6002989 (1999-12-01), Shiba et al.
patent: 6012048 (2000-01-01), Gustin et al.
patent: 6017771 (2000-01-01), Yang et al.
patent: 6036349 (2000-03-01), Gombar
patent: 6037664 (2000-03-01), Zhao et al.
patent: 6041263 (2000-03-01), Boston et al.
patent: 6041270 (2000-03-01), Steffan et al.
patent: 6054379 (2000-04-01), Yau et al.
patent: 6059636 (2000-05-01), Inaba et al.
patent: 6064759 (2000-05-01), Buckley et al.
patent: 6072313 (2000-06-01), Li et al.
patent: 6074277 (2000-06-01), Arai
patent: 6074443 (2000-06-01), Venkatesh et al.
patent: 6074517 (2000-06-01), Taravade
patent: 6077412 (2000-06-01), Ting et al.
patent: 6078845 (2000-06-01), Friedman
patent: 6094688 (2000-07-01), Mellen-Garnett et al.
patent: 6096649 (2000-08-01), Jang
patent: 6097887 (2000-08-01), Hardikar et al.
patent: 61

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