Electricity: electrothermally or thermally actuated switches
Electrothermally actuated switches
With longitudinally expansible solid element
Inventor
active
Charge dissipation in electrostatically driven devices
Driver and method of operating a micro-electromechanical...
Electro-mechanical device having a charge dissipation layer...
Electro-mechanical device having a charge dissipation layer...
Liquid electrical microswitch
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