Electro-mechanical device having a charge dissipation layer...

Details Electro-mechanical device having a charge dissipation layer... Electro-mechanical device having a charge dissipation layer...

2005-03-22

2005-03-22

Smith, Matthew (Department: 2825)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Including integrally formed optical element

C438S069000, C438S078000

Reexamination Certificate

active

06869815

ABSTRACT:
The present invention provides a micro-electro-mechanical system (MEMS) device, a method of manufacture therefore, and an optical communications system including the same. The device includes an electrode located over a substrate and a charge dissipation layer located proximate and electrically coupled to the substrate. The device may further include a moveable element located over the electrode.

REFERENCES:
patent: 6387787 (2002-05-01), Mancini et al.
patent: 20040012838 (2004-01-01), Huibers

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