Electro-mechanical device having a charge dissipation layer...

Details Electro-mechanical device having a charge dissipation layer... Electro-mechanical device having a charge dissipation layer...

2006-03-21

2006-03-21

Nelms, David (Department: 2818)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Including integrally formed optical element

C438S069000, C438S078000

Reexamination Certificate

active

07015056

ABSTRACT:
The present invention provides a micro-electro-mechanical system (MEMS) device, a method of manufacture therefore, and an optical communications system including the same. The device includes an electrode located over a substrate and a charge dissipation layer located proximate and electrically coupled to the substrate. The device may further include a moveable element located over the electrode.

REFERENCES:
patent: 6387787 (2002-05-01), Mancini et al.
patent: 2004/0012838 (2004-01-01), Huibers
Parent case U.S. Appl. No. 10/226,930, entitled An Electro-Mechanical Device Having A Charge Dissipation Layer and A Method of Manufacture Therefor, filed Aug. 22, 2002 currently pending.

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