4. Cleaning and liquid contact with solids
  5. Processes
  6. Using sequentially applied treating agents

Antonio L. P. Rotondaro

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Anneal sequence for high-&kgr; film property optimization

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Annealing of high-k dielectric materials

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Complementary transistors having respective gates formed...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Complementary transistors having respective gates formed...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Dry etch process for small-geometry metal gates over thin...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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