4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Annie Xia

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Method and system for etching a film stack

Semiconductor device manufacturing: process – Chemical etching
Reexamination Certificate

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Method and system for forming a feature in a high-k layer

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method and system for forming a feature in a high-k layer

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2388231

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