4. Semiconductor device manufacturing: process
  5. Making field effect device having pair of active regions...
  6. On insulating substrate or layer

Annelies Delabie

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Atomic layer deposition (ALD) method and reactor for...

Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate

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Atomic layer deposition method for depositing a layer

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method to enhance the initiation of film growth

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2337048

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