4. Semiconductor device manufacturing: process
  5. Including control responsive to sensed condition
  6. Optical characteristic sensed

Anne Elizabeth McGuire

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Dishing and erosion monitor structure for damascene metal proces

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Patent

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Dishing and erosion monitor structure for damascene metal proces

Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
Patent

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Rotary signal coupling for chemical mechanical polishing endpoin

Electricity: measuring and testing – Determining nonelectric properties by measuring electric... – Semiconductors for nonelectrical property
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Profile ID: LFUS-PAI-P-511671

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