Electricity: measuring and testing – Determining nonelectric properties by measuring electric... – Semiconductors for nonelectrical property
Patent
1996-03-19
1997-09-02
Oda, Christine K.
Electricity: measuring and testing
Determining nonelectric properties by measuring electric...
Semiconductors for nonelectrical property
324671, G01R 2700
Patent
active
056636377
ABSTRACT:
Rotary signal coupling in in-situ monitoring of a chemical-mechanical polishing process. A sensor fixed to a rotatable wafer carrier for creating a signal responsive to the chemical mechanical polishing process is coupled to a bottom half of a rotary transformer fixed to a rotating portion of the polisher. A top half of the rotary transformer, coupled to the bottom half of the rotary transformer, is fixed to a stationary portion of the polisher. The signal from the sensor is thus coupled through the rotary transformer to a process monitor.
REFERENCES:
patent: 4433510 (1984-02-01), Katagiri
patent: 4715007 (1987-12-01), Fujita
patent: 5559428 (1996-09-01), Li
Barbee Steven George
Doyle Gary Richard
Halperin Arnold
Holland Kevin L.
Kazak Francis Walter
International Business Machines - Corporation
Mortinger Alison D.
Oda Christine K.
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