Active solid-state devices (e.g., transistors, solid-state diode
Combined with electrical contact or lead
Of specified material other than unalloyed aluminum
Inventor
active
Advanced BEOL interconnect structures with low-k PE CVD cap...
Advanced BEOL interconnect structures with low-k PE CVD cap...
Bilayer HDP CVD/PE CVD cap in advance BEOL interconnect...
Bilayer HDP CVD/PE CVD cap in advanced BEOL interconnect...
Dual damascene interconnect structure using low stress...
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