4. Abrading
  5. Precision device or process - or with condition responsive...
  6. By optical sensor

Andrew Carswell

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Method and apparatus for removing material from microfeature...

Abrading – Flexible-member tool – per se
Reexamination Certificate

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Method and apparatus for removing material from microfeature...

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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Semiconductor processing method and chemical mechanical...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Systems and pads for planarizing microelectronic workpieces...

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2336417

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