Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate
2011-06-28
2011-06-28
Rachuba, Maurina (Department: 3727)
Abrading
Precision device or process - or with condition responsive...
By optical sensor
C451S008000, C451S041000, C451S287000
Reexamination Certificate
active
07967661
ABSTRACT:
Planarizing systems and methods of planarizing microelectronic workpieces using mechanical and/or chemical-mechanical planarization are disclosed herein. In one embodiment, a planarizing system includes a platen having a support surface carrying a planarizing pad. The planarizing pad includes an optically transmissive window extending through the planarizing pad that forms a continuous segment of the planarizing pad. The system also includes a workpiece carrier configured to move the workpiece relative to the planarizing pad and an optical monitor positioned proximate to the platen. The optical monitor emits light through the window and detects reflected light from the workpiece through the window.
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Carswell Andrew
Taylor Theodore M.
Micro)n Technology, Inc.
Perkins Coie LLP
Rachuba Maurina
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