Abrading – Flexible-member tool – per se
Reexamination Certificate
2007-11-13
2007-11-13
Ackun, Jr., Jacob K. (Department: 3723)
Abrading
Flexible-member tool, per se
C451S036000
Reexamination Certificate
active
11218239
ABSTRACT:
Methods and apparatus for removing materials from microfeature workpieces. One embodiment of a subpad in accordance with the invention comprises a matrix having a first surface configured to support a polishing medium and a second surface opposite the first surface. The subpad in this embodiment further includes a hydro-control agent in the matrix. The hydro-control agent has a hydrophobicity that inhibits liquid from absorbing into the subpad. The hydro-control agent, for example, can be coupling agents that are generally hydrophobic, surfactants that are hydrophobic, or other agents that are compatible with the matrix and at least generally hydrophobic.
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Kondo, S. et al., “Abrasive-Free Polishing for Copper Damascene Interconnection,” Journal of the Electrochemical Society, vol. 147,
Carswell Andrew
Kistler Rodney C.
Ackun Jr. Jacob K.
Micro)n Technology, Inc.
Perkins Coie LLP
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