4. Etching a substrate: processes
  5. Nongaseous phase etching of substrate
  6. Using film of etchant between a stationary surface and a...

Anantha Sethuraman

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Methods and systems for detecting a presence of blobs on a...

Abrading – Precision device or process - or with condition responsive... – With indicating
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Methods and systems for determining a characteristic of...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
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Methods and systems for generating a two-dimensional map of...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
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Methods and systems for monitoring a parameter of a...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Methods and systems for monitoring a parameter of a...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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