Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Physical stress responsive
Inventor
active
Method for the compensation of deviations occurring as a...
Micromechanical optical element having a reflective surface...
Oscillating, deflectable micromechanical element and method...
Projection apparatus
Projection apparatus for scanningly projection
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Profile ID: LFUS-PAI-P-2166390