4. Electricity: electrical systems and devices
  5. Electric charge generating or conducting means
  6. Use of forces of electric charge or field

Alexander Veytser

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Connectors for an electrostatic chuck and combination thereof

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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System and method for an improved susceptor

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Topographical structure of an electrostatic chuck and method of

Etching a substrate: processes – Forming or treating an article whose final configuration has...
Patent

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Profile ID: LFUS-PAI-P-1352303

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