System and method for an improved susceptor

Details System and method for an improved susceptor System and method for an improved susceptor

2006-08-29

2006-08-29

Paik, Sang (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C118S724000

Reexamination Certificate

active

07098428

ABSTRACT:
A susceptor including a substrate support and a conductor is provided. The substrate support includes a conductive element, a contact bonded to the conductive element, and a bushing. The conductor is disposed through the bushing and is bonded to the contact. The substrate support can also include a conductive spreader between the contact and the conductive element. A method for fabricating a susceptor is also provided. The method comprises forming a plate including a bushing preform, sintering or hot-pressing a conductive element and a contact between a ceramic layer and the plate to produce a substrate support, forming a conductor opening into the substrate support and through the bushing preform to the contact, and bonding a conductor into the conductor opening.

REFERENCES:
patent: 5306895 (1994-04-01), Ushikoshi et al.
patent: 5817406 (1998-10-01), Cheung et al.
patent: 6080970 (2000-06-01), Yoshida et al.
patent: 6358573 (2002-03-01), Raoux et al.

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