Topographical structure of an electrostatic chuck and method of

Details Topographical structure of an electrostatic chuck and method of Topographical structure of an electrostatic chuck and method of

1996-11-05

1999-03-23

Powell, William

Etching a substrate: processes

Forming or treating an article whose final configuration has...

156345, 216 20, 216 33, 216 52, B44C 122

Patent

active

058854690

ABSTRACT:
An apparatus for retaining a workpiece and a method of fabricating same. The apparatus contains an electrostatic chuck having a workpiece support surface. The workpiece support surface has protruded regions and non-protruded regions, where a total surface area of the protruded regions is less than a total surface area of the non-protruded regions. The apparatus contains a pedestal having a surface that supports a flex circuit. The topography of the chuck is formed by either machining the surface of the pedestal prior to adhering and conforming the flex circuit to the surface or sculpting the surface of an electrode within the flex circuit.

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