Connectors for an electrostatic chuck and combination thereof

Details Connectors for an electrostatic chuck and combination thereof Connectors for an electrostatic chuck and combination thereof

1998-12-14

2000-11-21

Jackson, Stephen W.

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

H02N 1300

Patent

active

061512036

ABSTRACT:
A semiconductor wafer chuck for retaining a semiconductor wafer during semiconductor wafer processing in a semiconductor wafer processing system including a connector connecting DC chucking voltage and RF biasing power to an electrode embedded in the body of the chuck. The connector for the chuck includes two or more members joined by resilient banana connections. The connector may be adapted for use as a high temperature connector for an electrostatic chuck operated at an elevated temperature and such connector includes a thermal impedance for reducing the heat transferred from the chuck to the bottom of the connector.

REFERENCES:
patent: 5548470 (1996-08-01), Husain et al.
patent: 5675471 (1997-10-01), Kotecki

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