4. Electric lamp and discharge devices: systems
  5. Discharge device load with fluent material supply to the...
  6. Plasma generating

Alexander Paterson

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Adjustable dual frequency voltage dividing plasma reactor

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus
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Dual plasma source process using a variable frequency...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Method for controlling etch uniformity

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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Plasma control using dual cathode frequency mixing

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Plasma reactor apparatus with independent capacitive and...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With gas inlet structure
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Profile ID: LFUS-PAI-P-2601392

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