4. Abrading
  5. Machine
  6. Rotary tool

Alex P. Pamatat

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Polishing carrier head with a modified pressure profile

Abrading – Machine – Rotary tool
Reexamination Certificate

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Polishing pad, a polishing apparatus, and a process for...

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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Substrate bonding with metal germanium silicon material

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates – Having enclosed cavity
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2930970

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