4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Albert R. Ellingboe

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Deformation reduction at the main chamber

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Deformation reduction at the main chamber

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
Reexamination Certificate

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Deposition of dopant impurities and pulsed energy drive-in

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – By application of corpuscular or electromagnetic radiation
Reissue Patent

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Deposition of dopant impurities and pulsed energy drive-in

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – By application of corpuscular or electromagnetic radiation
Patent

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Helicon wave excitation to produce energetic electrons for manuf

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-430462

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