4. Coating apparatus
  5. Gas or vapor deposition

Alan W. Collins

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Cleaning residues from surfaces in a chamber by sputtering...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Deposition chamber and method for depositing low dielectric cons

Coating apparatus – Gas or vapor deposition – With treating means
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Deposition chamber and method for depositing low dielectric...

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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Deposition chamber and method for depositing low dielectric...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
Reexamination Certificate

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Deposition chamber and method for depositing low dielectric...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With gas inlet structure
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Profile ID: LFUS-PAI-P-1585797

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