4. Optical: systems and elements
  5. Polarization without modulation
  6. By relatively adjustable superimposed or in series polarizers

Aksel Goehnermeier

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Microlithographic exposure method as well as a projection...

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Microlithographic exposure method as well as a projection...

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Objective with crystal lenses

Optical: systems and elements – Polarization without modulation – By relatively adjustable superimposed or in series polarizers
Reexamination Certificate

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Projection exposure method and projection exposure system...

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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