Optical: systems and elements – Polarization without modulation – By relatively adjustable superimposed or in series polarizers
Reexamination Certificate
2007-07-03
2007-07-03
Lavarias, Arnel (Department: 2872)
Optical: systems and elements
Polarization without modulation
By relatively adjustable superimposed or in series polarizers
C359S355000, C359S726000, C355S071000
Reexamination Certificate
active
10931745
ABSTRACT:
An objective, in particular a projection objective for a microlithography projection-exposure installation, with at least one fluoride crystal lens is disclosed. A reduction in the detrimental influence of birefringence is achieved if this lens is a (100)-lens with a lens axis which is approximately perpendicular to the {100} crystallographic planes or to the crystallographic planes equivalent thereto of the fluoride crystal. A further reduction in the detrimental influence of birefringence is obtained by covering an optical element with a compensation coating.
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Goehnermeier Aksel
Kraehmer Daniel
Kuerz Birgit
Pazidis Alexandra
Zaczek Christoph
Chapel Derek S.
Fish & Richardson P.C.
Lavarias Arnel
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